Alle EDWARDS Kataloge und technische Broschüren

P. 1

WWW.eOWA.F*OS\#KCUUM.COM

P. 2

P. 3

ContentsSmall Wet/Dry Pumps1Turbomolecular Pumps2Vapour Pumps3Measurement & Control4Vacuum Valves5Fittings and Flanges6Semiconductor Pumps7Industrial Pumps and Pumping Systems8Chemical Dry Pumps9Liquid Ring Pumps10Process Vacuum11Shelf Dryers12Se...

P. 4

P. 5

Small Wet/Dry Pumps1Page1Small Pumps and Pumping Systems2Small Pumps: Application and Accessory Information3Small Pumps and Accessories: Frequently Asked Questions4XDS Scroll Pumps5E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps21RV Rotary Vane Pumps25EM18...

P. 1

CXSChemical Dry Vacuum Pump...simply reliableVA CU U M & A B ATEM EN TIN N O VAT IV E TECHNO L O GYGL O B AL ST RENGT HL O CAL SU PPORT

P. 2

Why choose Edwards? SIMPLE TO INSTALL AND USE Integral controller and safety systems for 'Plug and Pump', flexible operation HIGH RELIABILITY Cutting edge screw technology for corrosion-free operation and robust liquid and solids handling LOW...

P. 3

Edwards new chemical dry pumpsets the standardsPerformanceSimple to use• • • • • • • • • • Continuous vacuum from atmosphere to 10-3 mbarIntegral temperature controlPumps corrosive vapours without...

P. 4

CXS Innovative Screw TechnologyAdvanced Screw TechnologyControl• • Integral PID pressure control with inbuilt inverter• Flexible communications options• • Edwards tapered screw technology results in smooth, gradualcompression...

P. 5

CXS CombinationsUsing an extensive range of pre-engineered modules Edwards CXS offers the capabilityto match most customer application needs.Systemisation is made easy with CXS pumps. The following items are available asfactory fitted standard matrix...

P. 1

EV ROTARY VANE PUMPSEdwards’ range of EV rotary vane pumpsare designed to be used in a wide range ofindustrial and scientific applications. Theycan be used individually or with mechanicalbooster pumps to increase both performanceand ultimate vacuum....

P. 2

EV ROTARY VANE PUMPSApplicationsThe EV series of rotary vane pumps are ideally suited to a wide range of industrial and scientific applications, including,but not limited to, the following:• • • • • Furnaces and metallurgy...

P. 3

GABCDEFGHJKLMNPCHBFAK4 x M8EJDLNMR 1¼" (1¼" BSP)R 1¼" (1¼" BSP)PHABCDEFGHJKLMNPQDCJGABL4 x M8FKEMPNG 2" (2” BSP)G 1½" (1½" BSP)QGAHCKJBLDEFMNRPQG 3" (3” BSP)SEV160528 (20.79)486 (19.13)250 (9.84)180 (7.09)302.5...

P. 4

Performance Curves 60 Hz supply - gas ballast off 10 10 10 10"     EV300_:EV160f R/i nn >EV70___EV40:   --" EV20EV20011    IO1- 10 50 Hz supply - gas ballast off 10 1...

P. 5

EV Rotary Vane CombinationsEdwards are able to offer a range of EV rotary vane pumps and mechanical boosters, complete with connection kits to mount themechanical booster. The fitting of a mechanical booster to an EV rotary vane pump significantly increases...

P. 1

GXSDRY SCREW VACUUM PUMPS& COMBINATIONSVacuum science... product solution.EDWARDSVACUUM.COM/GXS

P. 2

FASTReduced pump down times with ultimate vacuum of 5x10-4 mbarROBUSTReliable operation even in harsh industrial applicationsINTELLIGENTOn-board controller with extensive communication and automated control capabilitiesECONOMICALAffordable capital investment...

P. 3

GXS Dry Screw Vacuum Pumps& CombinationsIntelligent Technology - Advancing performanceEdwards is synonymous with vacuum. Having over 90 years experience andover 150,000 dry pumps installed worldwide, our high quality products andapplication know-how...

P. 4

ApplicationsMetallurgy - From tempering and annealing to steeldegassing, from surface treatments to melting, refining,casting and beam welding, the GXS offers the idealcombination of vacuum performance, extreme reliability,ease of integration and low...

P. 5

Features & BenefitsBest-in-class pumping speeds with high reliabilityGXS dry pumps are at the cutting edge of dry pumping performance. The tapered variable pitch screw designenables excellent pumping speeds, the advanced thermal management system...

P. 1

SPECTRA-G 800 EXHAUST MANAGEMENT SYSTEMThe Spectra-G is a cost-effective, highperformance exhaust treatment solution fornitride MOCVD manufacturing.Features and Benefits• High Abatement Performance— Capable of treating all exhaust gases frommultiple...

P. 2

Production-scale Gas Abatement System for Nitride4-Stage CombustionThe unique 4-stage combustion system of the Spectra-G ensuresthat oxidation of silane occurs in the middle of the combustionzone, away from the inlets, hence preventing the depositionof...

P. 3

MOCVD Optimum Combustion Nitride MOCVD processes involve the use of high H2 and NH3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation)....

P. 4

SPECTRA-G - EXHAUST MANAGEMENT SYSTEMSpectra-G units are suitable for all nitride-based MOCVD applications.Gases treated by Spectra-GProcess applications using any of the following gases can be treated:H2NH3TMGaTMAITMInOther gases can also be treated,...

P. 1

ATLAS™ GAS ABATEMENT SYSTEMSAtlas™ from Edwards: the range of combustion gasabatement solutions that offers semiconductor, flatpanel display, Solar and MOCVD manufacturersreduced operating costs and enhanced ease-of-use.Atlas abatement technology...

P. 2

ATLAS™ GAS ABATEMENT SYSTEMSInward-fired Combustion TechnologyUsed by most major semiconductor manufacturers, the inward-fired combustorhas become a world standard in gas abatement since 1994. This unique combustiontechnology operates with less...

P. 1

VACUUM AND ABATEMENTFOR THE LED INDUSTRYI N N O VATI V E P R O D U C TSG L O B A L STRENGTHLOCAL SUPPORTVACUUM EXPERTISE

P. 2

Vacuum Solutions for MOCVDEdwards is the world leader in themanufacture of vacuum pumps for a widerange of semiconductor applications. Ournew range of iXH pumps is especiallywell-suited to meet the challenges ofreliably pumping large flows of hydrogenand...

P. 3

Spectra Gfor Multi-ToolsAtlas-Heliosfor Single ToolsGaNcatfor R&DZenith Vacuum &Abatement for PhospidesFeatures• High DRE performance• Low cost of ownership• Low downtime• Minimised formation ofundesirable by-products• Fuel...

P. 4

Edwards — the company you have known and trusted for nearly 100 years – continues to deliverinnovative vacuum pumps and related systems. We strive to lower your cost of ownership,increase your productivity and enhance your final product quality....

P. 1

GX NEXT GENERATION DRYPUMPSThe GX Dry Vacuum Pump Series sets newstandards for zero maintenance betweenmajor overhauls. Improved efficiencylowers the cost of ownership and providescontinuous pumping duty throughout thepressure range. GX drypumps includeEthernet...

P. 2

GX NEXT GENERATION DRYPUMPS Specification Performance Peak Speed Ultimate pressure GX m3rr1 cfm I min 1 mbar torr Pa Power at 700 torr exhaust Ultimate AUC (Active Utility Controller) Water* Water inlet Nitrogen L...

P. 3

Speed Curves  emXL-■KM.(J! 1*1 loan   r            dAdoi a.oi 0.1 1 1* in i«n Pri'Siuri' {mbarl 10 1W 1<X» 1K>» lncww Lower...

P. 4

GX NEXT GENERATION DRYPUMPS Dimensions - mm (Inches) GX100 Side View GX300, 600, 1000 Side View J17.5 (8.62. © Si \j 510(20.1) 695 {17A) GX Top View SIC 110} 254(11.2} «S(17.1) 258 (10.2) 195 (7.7} SIC...

P. 1

iGX NEXT GENERATION DRYPUMPSThe iGX Dry Vacuum Pump Series sets newstandards for zero maintenance betweenmajor overhauls. Improved efficiencylowers the cost of ownership and providescontinuous pumping duty throughout thepressure range. iGX drypumps includeEthernet...

P. 2

iGX NEXT GENERATION DRYPUMPS Specification Performance Peak Speed Ultimate pressure Power at 700 torr exhaust Ultimate AUC (Active Utility Controller) Water* Water inlet Nitrogen L Variant N Variant M Variant Installation...

P. 3

Speed Curves  cu ....    r            arooi D.MH OLOI n.1 i in 100 1000 OOi 01 1 ID 100 000 I DOM 100000           (41...

P. 4

iGX NEXT GENERATION DRYPUMPS Dimensions - mm (Inches) iGXI00 Side View IGX 300, GOO, 1000 Side View _1«0 (I0.lt _ 4 o ® ©_ iGX Top View err- Yto (7.7) 510 (10.1) IK (771 z S10 (20.1) 695...

P. 1

iXL120 DRY PUMPiXL120 is a compact, low energy, 110 m3/hdry pump for wafer handling and otherclean duty applications. It provides fastpump down of load lock chambers withextremely low energy consumption.iXL120 is one of the smallest and lightest pumps...

P. 2

iXL120 DRY PUMPProductPeak speedUltimate pressure (typical)Power at ultimate 1Power in Green ModeInlet connectionOutlet connectionCooling water connectionNitrogen connectionWater flow 2Typical purge flowWeightm3/h/ cfm / l/minmbar/Torr/PakWkWVertical/Horizontall/mslmkgiXL120110/65/18330.013/0.009/1.30.550.045ISO63/NW50NW25Optionaln/a1059iXL120N110/65/18330.013/0.009/1.30.550.045ISO63/NW50NW25Optional1/4”...

P. 1

VS16K & IS16K VACUUM SWITCHESUser adjustable and vacuum interlock switches.The VS16K is a general purpose vacuum switch witha user adjustable set point and a small switchingdifferential.The switch point can easily be setusing a screwdriver over the...

P. 2

TECHNICAL DATA Specifications Range of adjustment Fixed set point Maximum switching differential Maximum working pressure Electrical rating Electrical connection plug Internal volume Materials in vacuum Leak rate Enclosure...

P. 1

CG16K CAPSULE DIAL GAUGESBarometrically compensated dial gauges with NWflange fittings.Edwards CG 16K capsule dial gauges cover therange from atmosphere down to 1 mbar absolute.These robust gauges provide accurate, repeatable performance even at low pressures...

P. 2

TECHNICAL DATASpecificationsAccuracy± 2% of F.S.D.Materials in vacuumInconel, aluminium, nickel, glass, nitrile, copper, alloyInternal volume160 cm3Maximum applied pressure2 bar absolute (1 bar gauge)Weight0.8 kgVacuum connectionNW16Accessories suppliedClamp...

P. 1

T-STATION 75 TURBOPUMPING STATIONThe T-Station 75 is Edwards’ new entry levelturbopumping system. It combines our provenEXT75DX with a choice of either an oil sealedE2M1.5 backing pump or an XDD1 diaphragmpump where a totally dry system is desired.The...

P. 2

T-STATION 75 TURBOPUMPING STATION Technical Data Dimensions Pumping speed for N2 NW40 ISO/CF63 Compression ratio for N2 Backing pump speed @50Hz E2M1.5 (TS75W) XDD1 (TS75D) Ultimate Pressure Inlet flange Exhaust...

P. 1

Turbo and Active Gauge (TAG) ControllerEdwards TAG (Turbo & Active Gauge) controller is a small low costpumping system controller, suitable for a wide range of vacuumapplications and compatible with all Edwards EXT and nEXTturbopumps. The large LED...

P. 2

Turbo and Active Gauge (TAG) ControllerTechnical DataMax input power Ordering InformationDescriptionAuxiliary terminals Air cooling fan Turbopump 24V d.c. 3.6W max24V d.c. 160W maxDimensions D40013025Mains lead — European plugD40013030Mains...

P. 1

EXT75DX & EXT255DXTURBOMOLECULAR PUMPSI N N O VATI V E P R O D U C T SG L O B A L STRENGTHLOCAL SUPPORTVACUUM EXPERTISE

P. 2

Turbomolecular pumps with on-board controllerEdwards is a world leader in the design and manufacture of turbomolecular pumps withover 200,000 units installed worldwide. The range of products includes the EXT75DX andEXT255DX compound turbomolecular pumps...

P. 3

DimensionsEXT75DXEXT255DXISO63CF63ISO1001CF10016 x ø8.4ø130.2PCDø100.1ø92.121 Electronic control podule22 Accessories connector socketo304 Electrical connection (to TIC)ISO1005 Purge port130CF100ø129.9 ø1526 Backing...

P. 4

Typical EXT DX Configuration Basic System Basic system A B C D E F TIC 200 Turbo Controller Mains cable (TIC and relay box supply) XDD1 diaphragm pump (24V) EXT DX turbo pump* ACX air cooler XDD/DX/EXDC extension...

P. 5

Technical Data Inlet flange Compression ratio N2 He H2 Outlet flange Recommended backing pump* Vent port Purge port Maximum continuous inlet pressure (light gas pumping)* Water cooling (water at 15 °C, ambient temp...

P. 1

XDSDRY SCROLL PUMPSI NNOVAT I V E P R O D U C TSG L O B A L S TRENGT HL O CAL SU PPO RTVACU U M EX PERTISE

P. 2

Unique design that sets the industry standardEdwards 30 years of experience in scientific applications affordsus a deep understanding of research practices and the critical rolethat vacuum plays within them. From this platform, and throughcollaboration...

P. 3

Inverter driven motor (XDS35i)Worldwide voltage, low power consumptionPump overload protectionRemote on/off control capabilityRemote speed selection capabilityAll pumps externallyapproved toEN61010,CSA C22.2 1010,UL 61010 standardsEase of incorporating...

P. 4

Specifications VACUUM DATA Peak pumping speed Ultimate pressure (Total) Ultimate pressure GB I (Total) High throughput mode Water vapor tolerance Water vapor capacity - GB I Water vapor capacity - GB II Hz 60 50 60 50 50/60 Ultimate...

P. 5

Dimensions333 (13.11)476 (18.74)1397 (15.63)XDS35i(5.24)133288 (11.34)XDS5/10(2.17)250(1.97)388 (15.28)212(8.35)55210 (8.27)180(7.09)224 (8.82)135 (5.32)427 (16.81)A290 (11.42)B49230 (9.06)353 (13.90)1204 x Ø9 (0.35)(4.72)(1.93)A Center line of on/off...

P. 1

MODEL 600 BAROCEL® CAPACITANCE MANOMETER The Model 600 Barocel transducer is an advanced design capacitance manometer which uses patented technology to improve zero stability after temperature excursions or pressure overloads. An integral...

P. 2

TECHNICAL DATA Specifications Pressure range Accuracy Resolution 0-10, 0-100, 0-1000 Torr 0-10, 0-100, 0-1000 mbar Ranges to 10,000 Torr also available 0.15% of reading standard 0.5% of reading also available Better than...

P. 1

ACTIVE ION GAUGE CONTROLLER RANGE 5 X 103 TO 2 X 10 11 mbar The Edwards Active Ion Gauge Controller (IGC) provides all the power, control and signal conditioning required to run one or two ion gauge heads When connected to a Edwards...

P. 2

ACTIVE ION GAUGE CONTROLLER RANGE 5 X 103 TO 2 X 10 11 mbar Technical Data Power supply Input voltage range Input frequency range Main supply socket Temperature range Operating Storage Relative humidity (non condensing) Enclosure...

P. 1

A compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 5 x 102 to 5 x 1010 Torr (6.6 x 102 to 6.6 X 10"10 mbar) and a 1 Volt/decade linear output. The AIGX gauge from Edwards incorporates all...

P. 2

ACTIVE ION GAUGE Specifications Pressue range Power supply Power consumption Output signal Response time Tube details Accuracy* Repeatability Filaments Degas Emission current 'S' versions 'D' versinos Maximum...

P. 3

Set point (open collector transistor) 1 on 'S' versions only Maximum voltage Maximum current Temperature range Operating temperature Storage temperature External interface connectors 'S' versions 'D' versions Interface cables 'S'...

P. 4

Dimensions - mm (in) S Version : 115 (4.53) D Version: Gauge Output                                               Torr/mber                      Pas;al                           10"10...

P. 1

The Wide Range Gauge (WRG) family offers the capability of single port pressure measurement in the range atmosphere to 10"9 mbar with a linear output. It is a compact solution, halving the space and connectivity hardware requirement, which...

P. 2

WIDE RANGE GAUGE Specifications Pressure range Accuracy* Maximum overpressure Power supply Power consumption Output signal Adjustments Set point Maximum voltage Current Temperature range Operating Storage temperature Materials...

P. 1

Edwards Active Inverted Magnetron Gauges (AIM) combine the gauge-head and controller in one compact Active unit. These gauges have proved to be rugged and reliable in a wide range of applications ranging from scientific instruments to industrial...

P. 2

ACTIVE INVERTED MAGNETRON GAUGE RANGE: 10 2 to 10 9 mbar Technical Data Pressure Range AIM-S AIM-X Accuracy* Maximum overpressure Power supply Power consumption Output signal Set point Maximum voltage Current Temperature...

P. 1

ACTIVE STRAIN GAUGE - RANGE 2000 TO 1 MBAR The Edwards Active Strain Gauge (ASG) is a rugged, corrosion resistant diaphragm gauge which provides accurate, gas independent measurement from 2000 mbar to 1 mbar. It can be used as a...

P. 2

ACTIVE STRAIN GAUGE - RANGE 2000 TO 1 MBAR Technical Data Full scale pressure range Accuracy Stability Temperature coefficient Power supply Power consumption Output Signal Operating Output impedance Minimum load Response...

P. 1

ACTIVE THERMOCOUPLE GAUGES RANGE SO TO 10- TORR The Edwards Active Thermocouple (ATC-E) gauges mount directly on the thermocouple tube to form a compact, stand-alone vacuum transducer. The ATC-E electronics module drives both medium and...

P. 2

ACTIVE THERMOCOUPLE GAUGES RANGE SO TO 10- TORR Technical Data ATC-E electronics module Power supply Power consumption Output signal Operating Fault output Output impedance Minimum load Tube type selection Adjustments Set...

P. 1

LINEAR CONVECTION GAUGE (APGX-H) Edwards Linear Convection Vacuum Gauge has a wide measuring range from 1333 to 3 x 10 4 mbar (1000 to 2.3 X 10-4 Torr).The use of convection technology ensures accuracy and sensitivity are maintained...

P. 2

LINEAR CONVECTION GAUGE (APGX-H) Technical data Pressure range Power supply Power consumption Output signal 1333 to 3 X 104 mbar (1000 to 2.3x104 Torr) 14.5 to 30 V DC 1.5 W maximum - mbar -Torr - Pascals Accuracy Repeatability Resolution Response...

P. 3

Diagnostics* (errors) Filament broken Calibration error Tube disconnected Display Status Setpoint Temperature range Operating temperature Storage temperature Material exposed to vacuum Aluminum tube Stainless steel...

P. 4

Compatibility Dimensions AGC APGX-H is supported by all new AGCs with serial numbers greater than: 027376147 (non RS232 versions) 027274158 (RS232 versions) Earlier controllers will require a software upgrade. ADC APGX-H...

P. 1

APG100 SERIES ACTIVE PIRANI VACUUM GAUGES Edwards APG100 series Active Pirani vacuum gauges are available in 2 models. The APG100-XM is the standard model and measures to IO 3 mbar. The APG100-XLC is a corrosion resistant version with measurement...

P. 2

APG100 SERIES ACTIVE PIRANI VACUUM GAUGES Dimensions - mm (inches) Performance Curve 25 (0.98)  XNW1630 (1.18)NW2540 (1.57) Technical Data NW16 version NW25 version Internal volume Enclosure rating 85 g 100...

P. 1

ACTIVE DIGITAL CONTROLLER (ADC) Edwards Active Digital Controller (ADC) is a compact single line vacuum gauge controller and display, featuring a bright LED display and simple push-button controls. The ADC automatically recognises compatible Edwards...

P. 2

ACTIVE DIGITAL CONTROLLER (ADC) Specifications - Standard Version * î-i5vaAfi0CÊLâ Front panel: Select display units Specifications - Mkll Enhanced Version SERIALOÖMM5 Front panel: G1 a 2 SP1 a 2 Hi,...

P. 3

Common Interfaces and Configuration Details  StandardEnhancedActive gauge compatibilityAPG100, APGX-H, WRG and the following legacy gauges -APG-L, APG-MP, APG-M, APGX-L, APGX-MP and APGX-M•/•/ AIM-S, AIM-X and ASG •/DisplayHigh...

P. 4

ACTIVE DIGITAL CONTROLLER (ADC) Environment and Standards Compliance Operating and Storage Data Standards Operating temperature0 to 40°CStorage temperature-30 to +70°CMax ambient operatinghumidity90% RH non-condensing...

P. 1

Manufacturers, laboratories and research establishments are converting to fieldbus to take advantage of the reduced cabling and network equipment costs. Edwards offers a compact, Din rail mountable module to allow Profibus protocol communications...

P. 2

PROFIBUS COMMUNICATIONS MODULE Technical Data Electrical data Electrical supply TIC Profibus module DX Profibus module Ambient operating temperature Ambient storage temperature Max ambient operating humidity IP rating Mass Connectors DC...

P. 1

TIC INSTRUMENT CONTROLLER Edwards TIC product range is a series of vacuum instrument controllers providing compact control with a large, clear graphical display, an intuitive user interface and serial communications. The supplied Windows™-based...

P. 2

TIC INSTRUMENT CONTROLLER Technical Data ELECTRICAL DATA Connector type Electrical supply Power consumption Fuse Earth stud OPERATING AND STORAGE DATA Ambient operating temperature range Ambient storage temperature range Maximum...

P. 3

External Interfaces And Configuration Options Logic interface Control inputs Status outputs Serial interface The logic interface connector may be used either to link to system relays, a higher-level control system, or an optional relay...

P. 4

TIC INSTRUMENT CONTROLLER É i Windows™ PC Program Access the Configuration Manager in order to: • Link gauge channels for pressure control of high vacuum gauges • Create,...

P. 5

Compatible Gauges  Power (Watt)3 head TIC6 head TIC6 head TICwithCapmanActive Pirani gauge - APG & APGX2W   Active Linear Convection gauge - APGX-H2W•/•/•/Active Inverted Magnetron gauge - AIM & AIMX2W•/•/•/Active...

P. 1

B065-10-880Issue C OriginalInstruction Manual18B4B Vapour Booster Pumps

P. 2

Dl/l/APOS Declaration of Conformity We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the...

P. 3

ëOI/l/AflOS B065-10-880 Issue C Contents Section Page 1 Introduction .......................................................................................1 1.1...

P. 4

B065-10-880 Issue C (Sn n o 3 4 Operation ........................................................................................ 31 /T\ 4.1 Introduction .............................................................................................................31 4.2...

P. 5

B065-10-880 Issue C Illustrations Figure Page 1 Part-sectional view of the 18B4B pump ..............................................................................5 2...

P. 1

HT16B HIGH THROUGHPUT DIFFUSION PUMP Edwards HT16B (ANS116 / IS0500 inlet) diffusion pump is designed for all light and heavy duty industrial applications. The robust construction gives high pumping speed at high pressure. The cast and...

P. 2

HT16B HIGH THROUGHPUT DIFFUSION PUMP Technical Data Comparative pumping speed ISO pumping speed Nitrogen Helium Maximum throughput (Nitrogen) Critical backing pressure (DC704EU) Minimum backing pump displacement for maximum...

P. 1

EDWARDSMAGLEV TURBOSAND THE ENVIRONMENTLEADING THE WAY WITH A NEW GENERATION OFINTEGRATED CONTROL MAGLEV TURBO PUMPS FORINDUSTRIAL APPLICATIONSCONSCIOUSL REDUCING YOURYCARBON FOOTPRINTTHE PATH TO A GREENER FUTUREIN N OVATI V E P R OD UC TSGLOBAL S TR...

P. 2

ACTION (DN GUCDBAL. WARMING Reducing energy usage ;3 Reducing global energy consumption is key in the fight against global warming. In addition to minimising the energy our production facilities and offices consume, our latest generation...

P. 3

Edwards HT10 Diffusion Pump vs Maglev Turbo Pump  HT10 Diffusion PumpSTP ÌXA2205% reductionC02 reduction peryear (tonnes)Power consumption5.1 kW0.3 kW*94%22.6 pa**Water consumption400 L/hr120 l/hr70%  Edwards HT16 Diffusion Pump vs...

P. 4

ŒNABUING ŒN\/IFlCDNMŒN-nAL- TŒŒh-INCDL- CD G Y GLASS COATING Vacuum coated glass is primarily used to control the solar generated thermal energy load on buildings. Multiple layers comprising exotic metal oxides create infrared...

P. 5

STEEL DEGASSING Vacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used in the production of speciality steel alloys to reduce the levels of hydrogen, carbon and other impurities during the secondary steel making process. Edwards...

P. 1

XDD 1 MKII/115/230 V and 24 V DC Diaphragm Pumps DescriptionItem NumberXDD 1 115/230 VXDD 1 24 VA746-02-983A746-02-991 WWW.EOWAF1DS\0KCUUM.ŒOM

P. 2

Declaration of Conformity We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) XDD1...

P. 3

5 A746-02-885 Issue A n o Contents ^. rD Section ...

P. 4

A746-02-885 Issue A Illustrations Figure Page 1 General view of XDD 1 with dual-voltage motor....................................................................4 2...

P. 5

S CD WA FI CD S A746-02-885 Issue A 1 Introduction 1.1 Safety i nfo rm ati o n Remove all packing material, remove the product from its packing-box, remove the protective covers from the inlet and outlet ports and keep them,...

P. 1

A480-15-880 Issue B Original Instruction Manual D-LAB Laboratory Vacuum Pumps DescriptionItemNumberD-LAB 10-100, diaphragm pump, 110 V, 60 Hz, single-phaseD-LAB 10-100, diaphragm pump, 220-240 V, 50 Hz, single-phaseD-LAB 10-100, diaphragm...

P. 2

Contents I. Introduction I I Modular System .--------....................-.....»..-.-—~—--------~—.....¡—3 I.I.I Vacuum Pump wrth two Separators (System SR)--------------,.,------—,..—,—„.,„„__________.............................___..3 I....

P. 3

Introduction The D-LAB vacuum pump series was developed specifically to satisfy the exacting standards, reliability and ease of use demanded in today's laboratory applications. Diaphragm pump technology has proved itself during re- cent...

P. 4

Figure 3: D-LAB system SH eg. pump model D-LAB 34-8 attached to the Condenser flange with a clamp. The con- densation temperature is maintained by running cold water or recirculated coolant through the Condenser. A The condenser must be installed...

P. 5

3. Assembling or Upgrading your System 3.1 Mounting the pump to the Baseplate (all systems) Basic requirements for the assembly of a D-LAB-system are a D-LAB pump and a Baseplate. The mounting-system allows interchange of pump...

P. 1

A652-18-880 Issue C Instruction Manual ATEX Rotary Vane Pumps i. Pump Type XXX RV3 = 652 RV5 = 653 RV8 = 654 RV12 = 655 E1M18 = 343 E2M18 = 363 E1M40 = 344 E2M40 = 364 E1M80 = 345 E2M80 = 365 E1M175...

P. 2

This page has been intentionally left blank.

P. 3

CD WA FR U S Declaration of Conformity We, BOC Edwards. Manor Royal, Crawley. West Sussex RH10 2LW.UK declare under our sole responsibility that the product(s) RV3. RVS, RV8. RV12 ATEX rotary vacuum pumps AXXX - YY ...

P. 4

CD WA 1=1 CDS Declaration of Conformity We. BOC Edwards. Manor Royal. Crawley, West Sussex RH10 21_W.UK declare under our sote responsibility that the produ«(s) E1M175, E2M175. E1M27S & E2M27S ATEX Rotary Vacuum Pumps AXXX...

P. 5

CDWAF=¡CDS Declaration of Conformity Wc. BOC Edwards. Manor Royal. Crawley. West Sussex RH10 2LW. UK declare under our sole responsibility that the product(s) E1M40. E2M40. E1M80 & E2M80 ATEX rotary vacuum pumps AXXX Pump...

P. 1

EM18 VACUUM PUMPS - PRODUCT SERVICE RECOMMENDATIONS Performance optimisation through regular maintenance. As with all mechanical devices, regular maintenance can help ensure optimised, safe performance of your Edwards EM Series vacuum pump....

P. 2

MAINTENANCE SCHEDULE AND SPARE PARTS Clean and overhaul kit: A36301131 (items in green below) Blade kit: A34301130/A36301020 (items in red below) Maintenance Schedule Interval E1M18 E2M18 Change the oil every 3,000 hrs/4 months Mineral...

P. 1

RV ROTARYVANE PUMPS, 1 1 2 9$7, 9 ( 3 5 2 ' 8& 76* / 2 % $/ 6 7 5 (1 * 7 +/2 & $ / 6 8 3 3 2579$ & 880 (; 3 ( 57, 6 (

P. 2

Proven performance that sets the industry standarc Edwards 30 years of experience in scientific applications affords us a deep understanding of research practices and the critical role that vacuum plays within them. From this platform, and through...

P. 3

G0RWRU RQRII VZLWFK(DV\ FRQWUROV3DWHQWHG PRGH VZLWFK+LJK YDFXXP RU KLJKWKURXJKSXW LQ RQH SXPS

P. 4

Dimensions - mm RV3 RV5 RV8 RV12 A 430 430 470 490 B 158 158 158 158 C 225 225 225 225 D 156 156 196 216 E 111 111 111 111 F 29 29 35 35 Note: Single...

P. 5

Ordering information Product description RV3 115/230V, 50760Hz set to 230V 100/200V, 50/60HZ 200-220V/380-415V, 50Hz 200-230/460V, 60Hz, 3 phase 115/230V, 50/60HZ setto 115V RV5 115/230V, 50/60HZ set to 230V 100/200V,...

P. 1

A371-32-880 Issue C Original Instruction Manual E2M0.7, E2M1 and E2M1.5 Rotary Vacuum Pumps DescriptionItem NumberE2M0.7 (0.7 m3 h"1) 200-230 V, 50/60 HzE2M0.7 (0.7 m3 h"1) 100-120 V, 50/60 HzE2M1.5 (1.5 m3 h"1) 200-230 V, 50/60 HzE2M1.5 (1.5...

P. 2

Declaration of Conformity We, Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) E2M0.7,...

P. 3

WARDS A371-32-880 Issue C Contents Section Page 1 Introduction .......................................................................................1 1.1...

P. 4

A371-32-880 Issue C &DWARDS —^ 5.9 Fit new blades...........................................................................................................22 f—f. 5.10 Test the motor condition ..............................................................................................22 Çfy...

P. 5

DUDAROS A371-32-880 Issue C Tables Table Page 1 Electrical data............................................................................................................6 2...

P. 1

P. 2

S 2 ^= -í z z ? 2 O O O CO s s o o .o íg B o o o o o o o o o 3 fei ín ín s m « te » s : HSU Q □ it : H < s m m m >t Ss 1 I £ « i...

P. 1

nXDSDRY SCROLL PUMP/nXDS

P. 2

ApplicationsMass Spectrometry—GCMS, LCMS, ICPMS, MALDI, RGA, Surface ScienceElectron Microscopy—TEM, SEM, Sample CoatersSample Preparation—Gel Dryers, Glove boxes, Rotary EvaporatorsResearch and Development—Chamber evacuation,...

P. 3

Edwards nXDS... the great new shape of dry vacuum pumping Edwards, a leading innovator in vacuum pump technology, is proud to present the new nXDS dry scroll pump range. With exceptional pumping capability, ultimate vacuum performance and...

P. 4

(DV\ WR XVH PDQXDOFRQWURO EXWWRQV6WDQGE\ VSHHG FRQWUROEXWWRQV IRU HIÀFLHQWSURFHVV WXQLQJ:LGH UDQJH YROWDJH LQSXWZLWK DXWRPDWLF VHOHFWLRQIRU VLPSOH RSHUDWLRQ+LJK HIÀFLHQF\ UDGLDO DLUJDS PRWRU IRU ORZ SRZHUFRQVXPSWLRQ2SWLPXP EHDULQJSODFHPHQW IRU...

P. 5

Performance nXDS has been designed to combine the latest advances in Scroll technology with an intelligent inverter drive coupled with the long established truly dry hermetically sealed mechanism of the XDS series nXDS is available in 4 sizes: nXDS6i nXDSWi nXDS15i nXDS20i m 0.100...

P. 1

EQUIPMENT AND SERVICES FOR SOLAR CELL MANUFACTURING WWW. EDWARDSVACUUM .COM/solar >GLOBAL STRENGTHLOCAL SUPPORTVACUUM EXPERTISEINNOVATIVE PRODUCTS size="-1">

P. 2

DRIVING DOWN YOUR COST PER WATT Edwards is the only manufacturer that can supply solar cell producers worldwide with a broad range of vacuum and turbo pumps e haust management li uid abatement wet cleaning/ etching e uipment and chemical management...

P. 3

GLOBAL SERVICE SUPPORT T E Europe Bolton, UKCrawley, UKBrno, Czech RepublicMunich, GermanyGennevilliers, FranceAvezzano, ItalyQiryat, IsraelBrussels, Belgium > AsiaPacific SingaporeTaiwanShanghaiAustraliaIna, JapanChunan City, KoreaIndia > nited...

P. 4

DRY VACUUM PUMPS E C V Drystar® Series The GV Drystar Series has been industry-proven on a variety of solar cell manufacturing processes. The GV160 is well-established on crystal pulling applications and capable of handling...

P. 5

Modular Vacuum Systems For large substrates (1.4 m >2 ) a-Si/-Si thin film solar applications, high flows of hydrogen are required during silicon deposition as well as substantial flows of fluorine containing gases for chamber cleans. The diHXK modular...

P. 1

VACUUM SOLUTIONSFOR THE MANUFACTURE OFTHERMAL VACUUM TUBES INNOVATIVE PRODUCTS GLOBAL STRENGTH LOCAL SUPPORT VACUUM EXPERTISE >

P. 2

VACUUM SOLUTIONS FOR THE MANUFACTURE OF THERMAL VACUUM TUBES Edwards is the only manufacturer that can supply thermal vacuum tube producers worldwide with a complete range of vacuum and turbo pumping systems to help you maintain your delivery and quality...

P. 3

SOLAR POWER IS A KEY RENEWABLE ENERGY SOURCE Thermal solar technology, using vacuum tube collectors, is the most efficient method of capturing the suns energy by heat transfer.Vacuum is an essential element in each stage of the manufacture of thermal...

P. 4

YOUR PROCESS... Edwards recommends the following Primary Pump options Secondary Pump options Rotary Vane Pumps Scroll Pumps Intelligen Pumps (Process) t Industrial combinations (Load lock) Turbomolecular Pumps Diffusion...

P. 5

THE NEED FOR VACUUM... Edwards is committed to providing renewable energy product manufactures with cost effective vacuum solutions at each stage of the production of thermal vacuum tubes. >indicates where vacuum is used Our constant focus on the solar...

P. 1

STP-iX455Integrated Turbomolecular Pump The STP-iX455 turbomolecular pump features an innovative magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates...

P. 2

Stand-Alone PumpSTP-iX455 Operates with 48V DC power supply onlyNo need for interconnecting cablesNo need for conventional rack-mounted control unit Pump and Power SourceSTP-iX455 + iPS-240 100-240 ACV power source availableRemote signal operationCompact...

P. 3

> STP-iX455 TECHNICAL DATA SPECIFICATIONS Inlet flange size ISO100K ISO160K Pumping speed N2 300 450 Liters/Second Pumping speed H2 300 460 Liters/Second Compression ratio N2 >108 >108 ...

P. 1

ALPHA14-895_eng.fm Page 1 Friday, November 29, 2002 12:26 PM LIQUID RING PUMP TECHNICAL DATA SHEET alpha 14+ single stage liquid ring vacuum pump 1160 1070 Q. o 735 O □ CO 100 200 300 400...

P. 2

ALPHA14-895_fre.fm Page 1 Friday, November 29, 2002 12:26 PM aractristiques techniques des pompes anneau liquid Pompe 頠 anneau liquide mono-tage ALPHA14+ 750 70C 650 600 550 500 v 450 .G 400 E 350 ^ 300 "~ 250 200 150 100...

P. 1

Liquid Ring Vacuum Pump LR1A23000 Edwards offers a full range of liquid ring pumps. The LR1A23000 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 22800 m3/ hr/13400 CFM 33 mbar/ 25 Torr 320 rpm 710 kW/1000 HP 60 Hz 22800 m3/ hr/13400 CFM 33 mbar/ 25 Torr 320 rpm...

P. 1

Liquid Ring Vacuum Pump LR1A5000 Edwards offers a full range of liquid ring pumps. The LR1A5000 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 4600 m3/ hr/ 2700 CFM 160 mbar/120 Torr 740 rpm 110 kW/150 HP 60 Hz 4400 m3/ hr/ 2600 CFM 160 mbar/120 Torr 710 rpm 110...

P. 1

Liquid Ring Vacuum Pump LR1A4000 Edwards offers a full range of liquid ring pumps. The LR1A4000 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 4000 m3/ hr/ 2350 CFM 33 mbar/ 25 Torr 740 rpm 110 kW/150 HP 60 Hz 3800 m3/ hr/ 2250 CFM 33 mbar/ 25 Torr 710 rpm 110...

P. 1

Liquid Ring Vacuum Pump LR1A400 Edwards offers a full range of liquid ring pumps. The LR1A400 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Liquid Ring Vacuum Pump - LR1A400 Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 350 m3/ hr/205 CFM 33 mbar/ 25 Torr 1450 rpm 11 kW/15 HP 60 Hz 420 m3/ hr/ 250...

P. 1

Liquid Ring Vacuum Pump LR1A300 Edwards offers a full range of liquid ring pumps. The LR1A300 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Liquid Ring Vacuum Pump - LR1A300 Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 260 m3/ hr/150 CFM 33 mbar/ 25 Torr 1450 rpm 7.5 kW 10 HP 60 Hz 320 m3/ hr/180...

P. 1

Liquid Ring Vacuum Pump LR1A200 Edwards offers a full range of liquid ring pumps. The LR1A200 provides a single-stage design and curved blade impellor with reinforcing rings for improved ruggedness, reducing noise and vibration. All of our liquid...

P. 2

Liquid Ring Vacuum Pump - LR1A200 Technical Data /Performance details Nominal capacity (saturated) Suction pressure Nominal speed Nominal motor power 50 Hz 170 m3/ hr/100 CFM 33 mbar/ 25 Torr 1450 rpm 5.5 kW 7.5 HP 60 Hz 200 m3/ hr/120...

P. 1

RV ROTARYVANE PUMPS INNOVATIVE PRODUCTS GLOBAL STRENGTH LOCAL SUPPORT VACUUM EXPERTISE >

P. 2

Proven performance that sets the industry standard -a_ -.- Edwards 30 years of experience in scientific applications affords us a deep understanding of research practices and the critical role that vacuum plays within them. From this platform,...

P. 3

d Motor on/off switch Easy controls > Patented mode switch High vacuum or high throughput in one pump >

P. 4

Specifications Hz Units RV3 RV5 RV8 RV12 VACUUM DATA Peak pumping speed 60 cfm 2.3 3.6 5.9 8.4 50 m3/h 3.3 5.1 8.5 12 Ultimate pressure (Total) 60 Torr 1.5 x 10-3 1.5 x 10-3...

P. 5

Ordering information Product descriptionOrder No.Order No. Product descriptionOrder No.Cord setsUK, three pin plugA50505000North European plugA50506000North American plugA50507000No plugA50508000OilUltragrade 19, 1 liter bottleH11025015Fomblin YVAC 06/6...

P. 1

A65201֖880IssueS Original Instruction Manual RV3, RV5, RV8 and RV12 Rotary Vane Pumps A 65X-YY-ZZZPump TypeVariantMotor DescriptionXYYZZZ2 = RV301 to 99903 = 220-240V, 50/60Hz, Single phase3 = RV5904 = 100/200V, 50/60Hz, Single phase4 = RV8905...

P. 2

0И/ДЯ05 Declaration of Conformity We, BOC Edwards, Marcr Royal, Crawley, West Sussex RM 10 2LW, UK declare under our sole responsibility that the product(s) A6SX-YY-ZZZ ▼ Y Pump Variant Type...

P. 3

ID WA Fl CD I A652-01-880 IssueS Contents Section 1 Introduction Page Scope and definitions .............. ATEX directive implications ....... Description ........................... Performance modes and controls Mode...

P. 4

fi ID WAR ID I A652-01-880 IssueS 4 4.1 4.1.1 4.1.2 4.1.3 4.2 4.2.1 4.2.2 4.2.3 4.3 4.4 4.5 4.6 4.7 4.8 ATEX directive implications ...........................................................................................27...

P. 5

A652-01-880 IssueS 7 Service and spares .............................................................................. 43 7.1 Introduction .............................................................................................................43...

P. 1

PRODUCT DATA Plus TCU 40/80 Temperature Control Unit The TCU 40/80 Plus is a single channel temperature control unitwhich offers enhanced heat load capacity,making the unit ideal forthe cooling of wafers during 300mm etch as well as other advancedsemiconductor...

P. 2

APPLICATIONS & TECHNICAL DATA APPLICATIONS The TCU 40/80 Plus Temperature Control Unit is a single channel chiller which supplies perfluorocarbon coolant in a closed loopfor temperature control of semiconductor process chambers and wafers during etch...

P. 3

PRODUCT SPECIFICATIONS PRODUCTSPECIFICATIONSDIMENSIONS Dimensions:22"W x 30"D x 30"H (35"H with casters)(559mm x 762mm x 762mm)Weight:416 lbs (178 kg)House water requirements:3-6 gpmTemperature range +10C to +26аCPressure 20 to 100psi maximumHouse...

P. 4

ORDERING INFORMATION PRODUCTDESCRIPTIONORDERINGNUMBER ? TCU 40/80 Plus* (includes instruction manual,all connecting fittings,W951-00-000shut off valves,secondary containment receptacle and funnel) SPAREPARTS ORDERINGNUMBER ? Instruction Manual:(Available...

P. 1

VACUUM SOLUTIONS FOR PROCESS INDUSTRIES INNOVATIVE PRODUCTS GLOBAL STRENGTH LOCAL SUPPORT VACUUM EXPERTISE >

P. 2

VACUUM EXPERTISE AND COMPLETE SOLUTIONS SOLUTIONS YOU CAN RELY ON, FROM A COMPANY YOU CAN TRUST Edwards is a world leader in the design, technology and manufacture of vacuum products for process applications in the chemical, pharmaceutical and energy...

P. 3

APPLICATIONS GUIDEEdwards has a unique combination of applications expertise, product portfolio, engineering strength and global presence.We pride ourselves on the experience and flexibility of our applications specialists, who will work with you to design...

P. 4

VACUUM PRODUCTS Our range of vacuum solutions and technologies is unique, allowing us to tailor the right solution to your needs: from steam ejectors and liquid ring pumps, to dry pumps and mechanical boosters.Edwards is market leader in dry pump technology...

P. 5

Edwards comprehensive design service is based on in-depth knowledge of your industry and applications. The expertise is held in our highly focused applications team: a central applications group and a regional network of applications specialists.Our solutions...

P. 1

product data D-LAB DIAPHRAGM UMP FEATURES  Teflon heads and diaphragms Օ One and two head versions 3 sizes  Compact, space-saving design Low noise Simple to use Low maintenance System options Օ Gas-tight...

P. 2

APPLICATIONS Rotary evaporationՕ Gel drying Vacuum desiccationՕ Vacuum filtration Vacuum degassingՕ Vacuum imprgnation Water-jet pump replacement Gas transfer镕 Medium vacuum applications Oil-free...

P. 3

TECHNICAL DATA 0-100 20-100 34-100 10-8 2o-a 34-8 4 Pumping speed (air) 0.6 m]h ' 1.2 rn'h-1 2.0 mJh 1 0.6 rin'h 1 1.2 mJh 1 2.0 0.35 cfm 0.7 cfm 1.2 cfm 0.35 cfm 0.7 cfm .2 cfm IO 1 min.' 20...

P. 4

D-LAB pump

P. 1

iH Series Drypumps >

P. 2

1st Choice for Vacuum Solutions S 2 S 2 > SEMICONDUCTOR INDUSTRYSTANDARDS COMPLIANCE The iH Series Drypumps comply withinternationally recognized semiconductorindustry standards:SEMI S2(Semiconductor Equipment and MaterialsInternational),ETL (Energy...

P. 3

BOC Edwards is a leading supplier of integrated process-enabling technologies,materials and services for semiconductor and Flat Panel Display (FPD) processes.Products include process gases,gas delivery systems,vacuum pumps,chillers,exhaust gas management,chemical...

P. 4

iH Series Benefits Pumping Expertise and Leadership BOC Edwards is the global market leader for advanced vacuum pumps, supplying over 60% of the pumps currently installed in 300 mm fabs.With more than 100,000 BOC Edwards dry pumps supplying vacuum...

P. 5

iH80 to iH1800 Series iH80iH600iH1800The iH Series is the product of over 20 years dryvacuum pump expertise and field experience.iH drypumps are the preferred pumps for most 300 mmproduction lines.iH pumps provide application-specificsolutions for the...

P. 1

FEM Rv m ^ s A50505000 A50506000 A50507000 ses Ultragrade l9, l Liter Hll0250l5 FomblinYVAC 06/6 lkg(532ml) Hll30l0l9 AnHttt FL20K- An»&Jf*i§ Al3305000 A46226000 A46229000 ...

P. 2

± & m 14 ig ® m & «E № -1 5H ABC D E F rv3 430 158 225 156 126 29 rv5 430 158 225 156 126 29 rv8 470 158 225 196 126 35...

P. 1

LRIB30000 ^-Ш 1ЯЖМШЯ МОД. : DIN 28431:1987 FITTED Cast iron 316 Cast iron CF-8 Cast iron CF-8 XC48** Cast iron A36 Cast iron ЗОВ Iron 65-45-12 * Cast...

P. 2

^ LRIB30000 $̌W^I$I Й##!В JEt: mm LRIB30000 ИЖ, fll«!-», /кШ*П1тШ'Ш!8&&*, GLOBAL CONTACTS EUROPE UK Crawley -(44) 129! S28844 Belgium Brussels...

P. 1

MECHANICALBOOSTER PUMPS > 300-30000 FOR INDUSTRIALVACUUMPROCESSES > BOC EDWARDS

P. 2

With over 100,000 pumps > in the field, BOC Edwards is recognised as a leading supplier of vacuum mechanical boosters to the industrial market. Every day BOC Edwards boosters are used in differentapplications from metallurgy, semiconductor, packaging,...

P. 3

Operation of Booster pumps High pumping efficiency The mechanical booster operates on the Rootsprinciple. It is made of two rotors rotating in oppositedirections in a stator. Due to the lobe shape of therotors and to the synchronisation their rotation...

P. 4

THE RIGHT SOLUTION Air admit > Edwards developed and patented the hydrokinetic drive whichallows continuous running at all pressures and prevents motoroverload in the EH and QMB series. The hydrokinetic fluidcoupling is integral with the pump and...

P. 5

Hydrokinetic fluid coupling INTEGRITY AND RELIABILITY The mechanical booster is in principle an oil-free pump as nolubrication or sealing in the pumping mechanism is required.However, the rotors are supported on bearings and accuratelygeared to each...